产品介绍
In order to meet the solar energy, photovoltaic industry, semiconductor industry, namely, CVD chemical gas deposition process of silane gas purification, silane exhaust gas can be used silane combustion tower.
Silane, also known as silane, chemical molecular formula SiH4 a compound, the gas is colorless and odorless, density 1.44 g / l, melting point -185 ℃, boiling point -111.8 ℃, insoluble in water. At room temperature silane is a flammable gas, in the air without the need to add a source of ignition, silane can be natural, generating silica and water, and release a large amount of heat, can be oxidized by the general oxidant.
应用领域
concentration
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ingredient
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sector
Silane gas from solar/photovoltaic industry, semiconductor industry, CVD chemical gas deposition process
air volume
unfilled
工艺流程
产品特点
Purification efficiency
Can be stabilized above 95%
Equipment life
Equipment in normal operation for more than 5 years
running cost
Low operating and maintenance costs
