Arsenophosane adsorption tower
Arsenophosane adsorption tower working principle: the use of chemical reaction, complex decomposition reaction and other basic principles, and a variety of waste gas chemical reaction, to generate stable non-toxic and harmless compounds or complexes, will not produce secondary pollution. Semiconductor industry arsenic-containing waste gas from the machine end of a separate collection, the formation of an independent system, arsenic alkyl phosphide treatment system is divided into two main parts, a stage for the Local Scrubber, i.e., the local dry adsorption device, using the principle of chemical adsorption, in the arsenic-containing system on the basis of the Local Scrubber will be pooled on the roof at the Central end of the again for the dry adsorption, the use of equipment, the use of chemical adsorption. Dry adsorption, the use of equipment called arsenophosphane adsorption tower. General arsenophosphane adsorption tower will also be configured with a one-use and one-standby mode, after adsorption through the end of the fan negative pressure discharge.
